Dry etching for microelectronics
Material type:
TextPublication details: New York : North- Holland Physics Publishing, 1984Description: xi,299p. : ill. ; 24cmISBN: - 0 44486905 0
- PHYSTK7871.85.D79
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| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Book | Directorate of Library Services (UDSM) | Physics Department | PHYSTK7871.85.D79 (Browse shelf(Opens below)) | Available | 000000320483 |
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Includes bibliographical references and index
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