Fundamental principles of optical lithography: the science of microfabrication Chris Mack
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TextPublication details: Chichester : John Wiley & Sons Ltd, 2007.Description: xvii,515p. : ill. ; 25cmISBN: - 0 470 01893 4
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| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Book | UDSM Library | Science and Engineering Collection | TK7874.M196 2007 (Browse shelf(Opens below)) | Available | 000000308474 | |||||||||||||
| Book | UDSM Library | Science and Engineering Collection | TK7874.M196 2007 (Browse shelf(Opens below)) | Available | 000000308475 |
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Includes bibliographical references and index
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