Forsgren, Katarina <br/><br/>
CVD and ALD of group IV-and V-oxides for dielectric applications 

 -  Acta Universitatis Upsaliensis  2001 
 - vi,48p.  ill.  25cm. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electric circuits
<br/><br/><label>LC Class. No.: </label>PAM TK3001.F6