TY  - BOOK
AU  - Berry, Robert W..
AU  - Peter M. Hall
AU  - Murray T. Harris
TI  - Thin film technology
AV  - TS695.B47 
PY  - 1968///
CY  - : New York
PB  - Van Nostrand
KW  - Thin films
KW  -  Circuits-Integrated
ER  -