Nyberg, Tomas <br/><br/>
Studies of the reactive sputtering process and CVD of diamond thin films 

 - Uppsala  Acta Universitatis Upsaliensis  1997 
 - 43p.  25cm. 
<br/><br/> Includes bibliographical references 
<br/><br/><label>ISBN: </label>9155441068 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Science and technology
<br/><br/><label>LC Class. No.: </label>PAM QA76.76.N9