| 000 | 00425nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230627s9999 xx 000 0 und d | ||
| 050 | _aPAM TK3001.F6 | ||
| 100 | _aForsgren, Katarina | ||
| 245 | 0 | _aCVD and ALD of group IV-and V-oxides for dielectric applications | |
| 260 | _bActa Universitatis Upsaliensis | ||
| 260 | _c2001 | ||
| 300 | _avi,48p. | ||
| 300 | _bill. | ||
| 300 | _c25cm. | ||
| 650 | _aElectric circuits | ||
| 999 |
_c124293 _d124293 |
||