| 000 | 00561nam a2200217Ia 4500 | ||
|---|---|---|---|
| 008 | 230524s9999 xx 000 0 und d | ||
| 020 | _a9155445721 | ||
| 040 | _cUDSM | ||
| 050 | _aPAM QD921.S5392R3 | ||
| 100 | _aRangsten, Pelle | ||
| 245 | 0 | _aMicrostructure Technology in silicon, quartz, and diamond | |
| 260 | _aUppsala | ||
| 260 | _bActa Universitatis Upsaliensis | ||
| 260 | _c1999 | ||
| 300 | _a37p. | ||
| 300 | _c25cm. | ||
| 650 | _aSilicon crystals | ||
| 700 | _aill. | ||
| 942 | _2Library of Congress Classification | ||
| 942 | _cPamphlet | ||
| 999 |
_c43296 _d43296 |
||