000			00621nam a2200229Ia 4500
008			230518s9999 xx 000 0 und d
020			_a9155441068
040			_cUDSM
050			_aPAM QA76.76.N9
100			_aNyberg, Tomas
245		0	_aStudies of the reactive sputtering process and CVD of diamond thin films
260			_aUppsala
260			_bActa Universitatis Upsaliensis
260			_c1997
300			_a43p.
300			_c25cm.
500			_aIncludes bibliographical references
650			_aScience and technology
700			_aill.
942			_2Library of Congress Library
942			_cPamphlet
999			_c7193 _d7193