| 000 | 00391nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 230524s9999 xx 000 0 und d | ||
| 100 | _aJaeger, Richard C. | ||
| 245 | 0 | _aIntroduction to microelectonic fabrication | |
| 260 | _aMenlo Park | ||
| 260 | _c1988 | ||
| 300 | _axiii, 232p. | ||
| 300 | _c23cm. | ||
| 700 | _aill. | ||
| 942 | _2Library of Congress Classification | ||
| 942 | _cBook | ||
| 999 |
_c9649 _d9649 |
||