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CVD and ALD of group IV-and V-oxides for dielectric applications

Forsgren, Katarina

CVD and ALD of group IV-and V-oxides for dielectric applications - Acta Universitatis Upsaliensis 2001 - vi,48p. ill. 25cm.

Subjects--Topical Terms:
Electric circuits

LC Class. No.: PAM TK3001.F6

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