CVD and ALD of group IV-and V-oxides for dielectric applications (Record no. 124293)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00425nam a2200157Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 230627s9999 xx 000 0 und d |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | PAM TK3001.F6 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Forsgren, Katarina |
| 245 #0 - TITLE STATEMENT | |
| Title | CVD and ALD of group IV-and V-oxides for dielectric applications |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Acta Universitatis Upsaliensis |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Date of publication, distribution, etc. | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | vi,48p. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Other physical details | ill. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Dimensions | 25cm. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Electric circuits |
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